Chinese Academy of Sciences develops a magnetic field sensitivity flexible spin valve sensor

[China Instrument Network Instrument R&D] The rapid development of flexible and smart wearable devices has raised the demand for flexible magnetoelectric devices. Due to the inverse magnetostrictive properties of the magnetic material, the stress/strain generated by the bent or stretched state changes the magnetic anisotropy of the magnetic film, thereby affecting the performance of the magnetic device. How to avoid the stress magnetic anisotropy has an adverse effect on the performance of the flexible magnetic device is one of the important challenges in the development of flexible magnetic films and devices. Based on this research, the Chinese Academy of Sciences prepared a flexible giant magnetoresistance spin valve sensor with high magnetic field sensitivity.

Magnetic film with periodic fold structure prepared by different growth processes

In recent years, the Magnetic Electron Materials and Devices Research Group of the Key Laboratory of Magnetic Materials and Devices of the Chinese Academy of Sciences systematically studied the stress/strain regulation of the magnetic anisotropy of flexible magnetic thin films and flexible exchange bias heterojunctions [Appl. Phys. Lett 100, 122407 (2012), Appl. Phys. Lett. 102, 022412 (2013), Appl. Phys. Lett. 105, 103504 (2014)]. By using the inverse piezoelectric effect and anisotropic thermal expansion characteristics of flexible polyvinylidene fluoride (PVDF) piezoelectric films, the temperature field and the electric field are combined in the flexible FeGa/PVDF and CoFeB/PVDF composite film materials to achieve magnetic anisotropy. With effective control, its magnetic anisotropy increases with increasing temperature and exhibits a positive temperature coefficient characteristic, which can solve the problem that magnetic anisotropy of conventional magnetic materials decreases with increasing temperature, resulting in high-frequency magnetic devices at high temperatures. The problem of degraded performance [Sci. Rep. 4, 6615 (2014), Sci. Rep. 4, 6925 (2014)]. Furthermore, the stress magnetic anisotropy of the magnetic thin film was improved by the frustum effect of the flexible substrate, and a high frequency magnetic thin film having a ferromagnetic resonance frequency of 5.3 GHz and a reflection loss of 28 dB was obtained [Appl. Phys. Lett. 106, 162405 ( 2015)].



Parallel microstrip flexible giant magnetoresistance spin valve device with periodic fold structure
For the spin valve device, the uniaxial magnetic anisotropy of the magnetic free layer is very small, so that the direction of the magnetic moment is easily changed by the external magnetic field, exhibiting a very high magnetic field sensitivity. However, in the case of flexible spin valve devices, the stresses resulting from the substrate during the manufacturing process, as well as the stresses resulting from deformations such as bending or stretching during use, will all greatly reduce the magnetic field sensitivity of the flexible spin valve device. Recently, the research team compared two methods for preparing magnetic thin films with a surface periodic structure on a flexible polydimethylsiloxane (PDMS) substrate. Magnetic films grown directly on stretched PDMS exhibit a regular surface wrinkle structure and weak magnetic anisotropy; a non-magnetic metal is used to create a surface periodic structure in advance, and the deposited magnetic film exhibits a stronger magnetic anisotropy. The opposite sex [Appl. Phys. Lett. 108, 102409 (2016)]. Based on this research, a flexible giant magnetoresistive spin-valve sensor with high magnetic field sensitivity was prepared by direct growth on the tensile PDMS. Longitudinal tensile strain can be released through the surface periodic structure, and parallel microstrips on the surface are designed. The transverse strain introduced by the Poisson effect can be released, thereby significantly reducing the effect of tensile strain on the magnetic anisotropy of the magnetic layer, and avoiding the fracture behavior of the metal film under tensile strain. The spin valve magnetic sensor is prepared at 50 In the tensile strain range of %, the magnetic resistivity, magnetic field sensitivity, and sample resistance can be kept constant. [ACSNano10, 4403 (2016)]. The stretchable magnetic sensor with stable reliability can be used as a current sensor, a position sensor, an angle sensor, a gear sensor and the like, and is integrated in a flexible smart wearable device, and has an important application prospect.

(Original title: A series of progresses in the research of flexible magnetic sensing film materials and devices at the Ningbo Institute of Materials, Chinese Academy of Sciences)

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